Dr. Prem Pal

Professor
MEMS & Micro/Nano Systems Laboratory
Department of Physics

Indian Institute of Technology Hyderabad
Telangana, India - 502 285
Phone No :+91-40-2301-6035
Fax. No : +91-40-2301-6032
E-mail : prem [at] iith [dot] ac [dot] in

Academic Profile

• Indian Institute of Technology Delhi, India
  Ph.D in the area of MEMS 2004,
  Thesis title: Some Novel Processes and Techniques for MEMS Design, Fabrication and Characterization
• M. Tech Solid State Materials 1999
  Dissertation: Fabrication and Characterization of MOS Capacitor for High Performance Silicon Devices and ICs

Research Interests

• MEMS/Microelectronics technology
• Silicon Micromachining
• Anodic Oxidation
• IR Detector
• MEMS-based Bio/Chemical Sensors
• Inertial sensors
• Thin films for MEMS

Teaching

• PH1010: Physics-I
• PH1031: B.Tech Lab
• PH5130: Quantum Mechanics-I
• PH5211: MSc Lab
• PH 6340: Semiconductor Physics & Devices
• PH6450: MEMS and Microsystem Technology

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