Six days TEQIP Workshop
MEMS & NEMS (Fundamentals, Design and Fabrication)
December 17-22, 2018

Registration is now open, Last date for receiving applications : 20th November, 2018

About the workshop:
This six days workshop on MEMS & NEMS (Fundamentals, Design and Fabrication) scheduled from December 17-22, 2018 is sponsored by TEQIP-III. This workshop is fifth in the series of workshops organized successfully every year from the year 2013. The last workshop was organized from October 21-26, 2016 at IIT Hyderabad. As similar to previous year’s workshops, this year’s workshop also has some unique features about hands on experimental sessions along with the theoretical details about the design and fabrication processes of MEMS and NEMS. Apart from brief theoretical design rules, the present workshop is intended to give hands on (experimental) training to the scientists and researchers who are interested in the field of MEMS and NEMS. The hands on training (experimental) will include the design of simple MEMS/NEMS structures, fabrication of MEMS/NEMS structures using photoresists, transfer of pattern into polymers using soft lithography, and wet etching to develop the suspended structures. One of the major highlight of this year's workshop is inaugural keynote address by Prof. Kazuo SATO. Prof. Sato currently is an emeritus professor of Nagoya University, Janpan a guest professor at AIT, and an auditor of Yokohama National University, Japan. He is a worldwide recognized leading researcher in this exciting area.
This year, we will also have Dr. Hiroshi Tanaka as another keynote speaker who is currently a Professor in the Department of Mechanical Engineering at Aichi Institute of Technology, Japan.

Topics to be covered:
Fundamentals of Silicon based MEMS
Dry and Wet Etching
Polymer and Carbon based MEMS & NEMS
MEMS Design
MEMS and NEMS in Sensors, Healthcare and Energy
Fabrication of MEMS & NEMS in Silicon, Polymer and Carbon

Date and Time
Dates: December 17-22, 2018
Indian Institute of Technology Hyderabad
Kandi, Sangareddy-502285.