Micro- and Nano- Electromechanical Systems (MEMS/NEMS) are the examples of integration of mechanical elements with sensors, actuators and electronics through a variety of micro and nano fabrication tool kit. MEMS/NEMs based devices have been developed and are being developed for the applications in various sectors such as consumer, medical, defense, space, communication etc. The MEMS market is still one of the fastest growing zones of the semiconductor industries.This five days workshop cum certificate course on MEMS and NEMS will cover a wide range of topics right from the fundamentals to applications.
Course objectives:
- Fundamental basis of MEMS/NEMS.
- Overview of basic microfabrication processes.
- Bulk and Surface micromachining.
- Polymer and Carbon MEMS.
- MEMS design, modeling and simulation.
- 3D Integration.
- MEMS-based sensors and actuators.
- Comprehensive hands-on experience of MEMS Experiment.
- Design and simulation of microcantilever beams and diaphragms
- Wafer cleaning
- Photolithography (resist spin coating, exposure, development)
- Silicon micromachining
- Fabrication of suspended MEMS structures (e.g. microcantilever, diaphragm, etc.)
- Fabrication of SU-8 MEMS Structures
- Polymer and carbon based MEMS structures using soft-lithography
Who Should Attend?
Student, Engineers, Scientists, Technologists and Faculty seeking basic and better understanding of MEMS and NEMS. Moreover the course will be very useful for those who wish to make their career in the MEMS and Semiconductor industries.
Pre-requisites:
Completed B.Tech/B.E./M.Sc. /M.Tech in any branch.